文章摘要
吴礼群.Parylene敷形涂层[J].电子机械工程,2004,20(6):51-53,61
Parylene敷形涂层
Parylene Conformal Coating
  
DOI:
中文关键词: Parylene  气相沉积  敷形涂层
英文关键词: parylene  vapor phase deposition  conformal coating
基金项目:
中图分类号:TG174.4
作者单位
吴礼群 南京电子技术研究所 
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中文摘要:
      Parylene是一种性能优异的高聚合物材料,它能涂敷到各种形状的表面,例如金属、玻璃、纸张、树脂、塑料、陶瓷等。简述了Parylene涂层的性能,对Parylene涂层的沉积过程、沉积设备和Parylene涂层的应用领域进行了论述,并对Parylene涂层的性能与环氧树脂、有机硅树脂、聚氨酯涂层的性能进行了比较。
英文摘要:
      Parylene is a conformal protective polymer coating material utilized to uniformly protect any component surface configuration on diverse substrates such as metal, glass, paper, resin, plastic, ceramic etc. This article introduces deposition process of parylene, properties of parylene, applications of parylene and parylene deposition equipment. The properties are compared with those reported for other conformal coating materials such as epoxides, silicones, and urethanes.
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