毫米波波导器件精密制造工艺技术研究综述

Review on Precision Manufacturing Technology of Millimeter-wave Waveguide Device

中文关键词: 毫米波  波导器件  精密制造

英文关键词: millimeter-wave  waveguide device  precision manufacturing

中文摘要:

      精密制造工艺技术是保证毫米波波导器件性能的关键技术。文中首先定义了波导器件精密制造技术按照制造过程中器件体积变化情况的分类，主要分为减材制造、等材制造和增材制造三大类；然后论述了毫米波波导器件各类工艺技术的应用研究情况，分析了波导器件精密制造的材料选择、结构特点、尺寸精度、加工数量、周期成本等要素，提供了工艺集成设计和实现方案；最后展望了精密制造技术的发展趋势。该综述将为毫米波波导器件精密制造工艺技术的深入研究和工程应用提供有益借鉴。

英文摘要:

      The precision manufacturing technology is the key technology to ensure the performance of millimeter-wave waveguide device. Firstly, this paper defines the types of precision manufacturing technologies of millimeter-wave waveguide device according to the changes of device volume in the manufacturing process, and they are mainly divided into three categories: subtractive manufacturing, equal material manufacturing and additive manufacturing. Then, the application researches of various process technologies of millimeter-wave waveguide device are introduced. The material selection, structural characteristics, dimensional accuracy, processing quantity and cycle cost of precision manufacturing are analyzed, and the process integration design and implementation scheme are provided. Finally, the development trend of precision manufacturing technology is prospected. The review will provide a useful reference for the further research and application of precision manufacturing technology of millimeter-wave waveguide device.